产品描述：
● 探针针尖检测样品是用于检查针尖的形状和尺寸。
● 每个空室都有编号，有助于在相同的位置进行校准。
● Layout: 88 cells ; on 1 x 1 mm area, on 6 x 6 mm silicon chip
● IVPS100是一个针尖半径和角度表征的样品。
Specifications:
Pitch standard
Array of 5 silicon lines with vertical, paralell sidewalls (111-crystal planes)
Linewidth:
100 nm (actual linewidth is delivered for each chip)
Pitch:
500nm ± 10 nm
Depth:
~900 nm
Surface/siderwall angle:
<90° ± 0.5°
Sidewall parallelityL
<1°
Toy corner radius
<10 nm
Well suited also as SEM standard
订购型号
Order Code
Quantity
Price
IVPS 100
1
询价
